Methods for forming a transparent oxide layer for a photovoltaic device

US9276142B2 · kind B2 · utility

Assignee

• First Solar, Inc. · US

Inventors

• Hongying Peng · Niskayuna, US
• Robert Dwayne Gossman · Aurora, US
• Juan Carlos Rojo · New York, US
• Steven Jude Duclos · Niskayuna, US

Key dates

• Filing date: Nov 29, 2011
• Grant date: Mar 1, 2016
• Expiry date: Feb 27, 2033

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P70/50

Abstract

A method of manufacturing a transparent oxide layer is provided. The manufacturing method includes disposing a cadmium tin oxide layer on a support, placing the support with the cadmium tin oxide layer within a chamber of a rapid thermal annealing system, and rapidly thermally annealing the cadmium tin oxide layer by exposing the cadmium tin oxide layer to electromagnetic radiation to form the transparent oxide layer, wherein the rapid thermal anneal is performed without first pumping down the chamber.