Method for removing burrs of battery electrode plates by inductively coupled plasma dry etching
US9276254B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 2, 2013 |
| Grant date | Mar 1, 2016 |
| Priority date | — |
| Expiry date | Sep 15, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention provides a method for removing burrs of battery electrode plates using inductively coupled plasma (ICP) dry etching, in which an induction coil is used for ionizing reaction gas. A DC bias is applied to accelerate the ionized reaction gas to bombard the burrs of electrode plate, removing burrs that formed in machining processes using physical bombardment. The equipment used in the present invention is an ICP etch system. The method according to the present invention can completely remove the burrs of electrode plate, thereby effectively preventing short circuits caused by burrs penetrating the membrane separator in the battery.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.