Generating high-frequency power for a load

US9276456B2 · kind B2 · utility

Assignee

• TRUMPF HUETTINGER GMBH + CO. KG · DE

Inventors

• Andre Grede · Glückstadt, DE
• Daniel Krausse · Mountain View, US
• Anton Labanc · Ehrenkirchen, DE
• Christan Thome · Glückstadt, DE
• Alberto Vidal · San Jose, US

Key dates

• Filing date: Jun 18, 2015
• Grant date: Mar 1, 2016
• Expiry date: Jun 18, 2035

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05H2242/26
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

A power-supply system has a power converter configured to generate a high-frequency power signal and supply the high-frequency power signal to a load such as a plasma or gas laser process. The power converter includes a digital-to-analog converter (DAC) configured to generate an analog signal from a digital signal, an amplifier path in which the generated analog signal is amplified, and a logic-circuit unit coupled upstream of the DAC and configured to generate the digital signal and supply the generated digital signal to the DAC. The logic-circuit unit includes a signal-data buffer storing a signal-data value for generating a shape of the analog signal, an amplitude-data buffer storing an amplitude-data value for influencing an amplitude of the analog signal, and a multiplier configured to multiply the signal-data value by the amplitude-data value.