Patent · US Active

Capacitive MEMS element including a pressure-sensitive diaphragm

US9277329B2 · kind B2 · utility

2Cited by

5References

5Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Christoph Schelling · Stuttgart, DE
Rolf Scheben · Stuttgart, DE
Ricardo Ehrenpfordt · Gerlingen, DE

Key dates

Filing date	Aug 27, 2014
Grant date	Mar 1, 2016
Priority date	—
Expiry date	Aug 27, 2034

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2201/003
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

An implementation for an electret in a capacitive MEMS element including a pressure-sensitive diaphragm, which is produce-able using standard methods of semiconductor technology for easy integration into the manufacturing process of MEMS semiconductor elements. Such MEMS elements include at least one pressure-sensitive diaphragm including at least one deflectable diaphragm electrode of a capacitor system for signal detection and one fixed non-pressure-sensitive counter-element including at least one counter-electrode of this capacitor system, at least one electrode of the capacitor system being provided with an electrically charged electret, so that there is a potential difference between the two electrodes of the capacitor system. The electret includes at least two adjacent layers made from different dielectric materials, electrical charges being stored on their boundary surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.