Manufacturing process of MEMS device
US9278853B2 · kind B2 · utility
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2References
16Claims
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Assignee
Inventors
Key dates
| Filing date | Apr 18, 2014 |
| Grant date | Mar 8, 2016 |
| Priority date | — |
| Expiry date | May 22, 2034 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/0792
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A manufacturing process of a MEMS device divides a substrate for fabricating a MEMS component into two electrically isolated regions, so that the MEMS component and the circuit disposed on its surface could connect electrically with another substrate below respectively through the corresponding conducing regions, whereby the configuration of the electrical conducting paths and the manufacturing process are simplified. A MEMS device manufactured by using the aforementioned process is also disclosed herein.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.