Patent · US Active

Method for producing a sensor

US9278854B2 · kind B2 · utility

2Cited by

0References

18Claims

0Family size

Assignee

EPCOS AG · DE

Inventors

Wolfgang Pahl · Munich, DE
Anton Leidl · Munich, DE
Jürgen Portmann · Munich, DE
Robert Eichinger · Pullach, DE
Christian Siegel · Munich, DE
Karl Nicolaus · Munich, DE
Thomas Wassner · Birkenfeld, DE
Thomas Sedlmeier · Pfaffenhofen an der Ilm, DE

Key dates

Filing date	Feb 8, 2013
Grant date	Mar 8, 2016
Priority date	—
Expiry date	Feb 8, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2924/1461
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

The present invention relates to a method for producing a sensor (SEN), comprising the steps of arranging a sensor element (SE) on a carrier (TR), arranging a cover (AF) on the sensor element (SE), wherein the sensor element (SE) is enclosed between the cover (AF) and the carrier (TR), adhesively bonding a carrier film (TF) onto the cover (AF), and producing an opening (SO) in the carrier film (TF) and the cover (AF), wherein the openings (SO) in the carrier film (TF) and the cover (AF) at least partly overlap.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.