Patent · US Active

Acceleration sensor structure and use thereof

US9279825B2 · kind B2 · utility

3Cited by

4References

11Claims

0Family size

Assignee

MURATA ELECTRONICS OY · FI

Inventors

Ville-Pekka RYTKÖNEN · Klaukkala, FI
Leif Roschier · Vantaa, FI
Anssi Blomqvist · Helsinki, FI

Key dates

Filing date	Jan 11, 2013
Grant date	Mar 8, 2016
Priority date	—
Expiry date	Jan 18, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0831
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A MEMS-sensor structure comprising first means and second means coupled for double differential detection and positioned symmetrically to provide quantities for the double differential detection in a phase shift. If the sensor deforms, due to a specifically symmetric positioning of the first and second means, the effect of the displacement is at least partly eliminated.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.