Exposure device
US9280062B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 4, 2011 |
| Grant date | Mar 8, 2016 |
| Priority date | — |
| Expiry date | Nov 23, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K2201/09936
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An exposure device can exposes a circuit pattern while information data is suitably changed. An exposure device comprises a first light source (20) for irradiating a first light including ultraviolet rays, a projection exposure unit (70) for exposing a circuit pattern drawn on a photomask on a substrate, with the first light, a substrate stage (60) for mounting the substrate, a housing (11) for arranging the substrate stage, a second light source (41) for irradiating a second light including ultraviolet rays, arranged at a position different from the first light source, a spatial light modulation unit (40) for exposing information data formed electrically using the second light on the substrate, and a spatial optical light modulation unit driving means (5) for moving the spatial light modulation unit arranged on the housing (11) in a direction parallel to a moving direction of the substrate stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.