Non-contact magnetic drive assembly with mechanical stop elements
US9281231B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 11, 2012 |
| Grant date | Mar 8, 2016 |
| Priority date | — |
| Expiry date | Nov 3, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49826
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A non-contact magnetic drive assembly with mechanical stop elements for a vacuum deposition system employing a lift-off process having a HULA configuration featuring a plurality of magnets coupled in an annular orientation to a central ring and an orbital ring, each magnet of the orbital ring becomes superposed with a magnet of the central ring as the orbital ring rotates, and a central drive component driving either the central ring, the orbital ring around the central ring or both simultaneously, the central drive component provides a rotational speed allowing non-contact, magnetic drive rotation of the orbital ring around the central ring until a difference between a magnetic drive torque of the superposed magnets and the rotational speed of the central drive component causes the superposed magnets to decouple enabling mechanical drive rotation by interactive contact between a plurality of central ring teeth and a plurality of orbital ring.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.