Patent · US Active

Non-contact magnetic drive assembly with mechanical stop elements

US9281231B2 · kind B2 · utility

0Cited by
6References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 11, 2012
Grant dateMar 8, 2016
Priority date
Expiry dateNov 3, 2034

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/49826
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A non-contact magnetic drive assembly with mechanical stop elements for a vacuum deposition system employing a lift-off process having a HULA configuration featuring a plurality of magnets coupled in an annular orientation to a central ring and an orbital ring, each magnet of the orbital ring becomes superposed with a magnet of the central ring as the orbital ring rotates, and a central drive component driving either the central ring, the orbital ring around the central ring or both simultaneously, the central drive component provides a rotational speed allowing non-contact, magnetic drive rotation of the orbital ring around the central ring until a difference between a magnetic drive torque of the superposed magnets and the rotational speed of the central drive component causes the superposed magnets to decouple enabling mechanical drive rotation by interactive contact between a plurality of central ring teeth and a plurality of orbital ring.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.