Biocompatible electrodes and methods of manufacturing biocompatible electrodes
US9281239B2 · kind B2 · utility
2Cited by
12References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 26, 2009 |
| Grant date | Mar 8, 2016 |
| Priority date | — |
| Expiry date | Nov 30, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/76883
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A biocompatible electrode is manufactured by depositing filling metal 36 and etching back the filling metal to the surface of the surrounding insulator 30. Then, a further etch forms a recess 38 at the top of the via 32. An electrode metal 40 is then deposited and etched back to fill the recess 38 and form biocompatible electrode 42. In this way, a planar biocompatible electrode is achieved. The step of etching to form the recess may be carried out in the same CMP tool as is used to etch back the filling metal 36. A hydrogen peroxide etch may be used.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.