Apparatus and method for fabricating organic light emitting display
US9281479B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 23, 2014 |
| Grant date | Mar 8, 2016 |
| Priority date | — |
| Expiry date | Feb 22, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K59/10
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for fabricating an organic light emitting display includes a chamber, a stage having a hollow portion, a displacement sensor on the stage and configured to measure a distance between the stage and a measurement target that is on or over an upper part of the stage, and a controller. The controller includes an input unit configured to receive distance information obtained by the displacement sensor, a memory unit configured to store reference distance information, a determination unit configured to compare the distance information received by the input unit with the reference distance information, and an output unit configured to output a variable control signal according to whether or not the determination unit determines that the distance information between the stage and the measurement target corresponds to the reference distance information. A method for fabricating an organic light emitting display using the apparatus is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.