Patent · US Active

Linear capacitive displacement sensor

US9285207B2 · kind B2 · utility

2Cited by

5References

11Claims

0Family size

Assignee

InvenSense, Inc. · US

Inventors

Baris Cagdaser · Sunnyvale, US
Du Chen · Beijing, CN
Hasan Akyol · New York, US
Derek K. Shaeffer · Redwood City, US

Key dates

Filing date	Jul 26, 2013
Grant date	Mar 15, 2016
Priority date	—
Expiry date	Apr 22, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG01L1/144
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method and system for measuring displacement of a structure is disclosed. The method and system comprise providing a first capacitance and providing a second capacitance. The first and second capacitances share a common terminal. The method and system further include determining a difference of the inverses of the value of the first and second capacitances when the structure is displaced. The first capacitance varies in inverse relation to the displacement of the structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.