MEMS micro-mirror device
US9285668B2 · kind B2 · utility
1Cited by
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18Claims
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Key dates
| Filing date | Dec 5, 2012 |
| Grant date | Mar 15, 2016 |
| Priority date | — |
| Expiry date | Dec 6, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A MEMS micro-mirror device includes, a single package; a first mirror and second mirror, wherein at least one of the mirrors is configured to oscillate along an oscillation axis; wherein both mirrors are located within the single package and are arranged such that as the at least one mirror oscillates, the light incident on the first micro-mirror can be deflected to the second mirror.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.