Reflective surface shape controllable mirror device, and method for manufacturing reflective surface shape controllable mirror
US9287016B2 · kind B2 · utility
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5Claims
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Key dates
| Filing date | Dec 28, 2010 |
| Grant date | Mar 15, 2016 |
| Priority date | — |
| Expiry date | Dec 28, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The device is configured from: a reflective surface shape controllable mirror in which a band-shaped X-ray reflective surface 2 is formed on a central portion of a front surface of a substrate 1, reference planes 3 are formed along both sides of the X-ray reflective surface, and a plurality of piezoelectric elements 4 are attached to at least one of front and back surfaces of the substrate so as to be arranged in the longitudinal direction of the X-ray reflective surface on both side portions of the substrate, and a multichannel control system for applying a voltage to each of the piezoelectric elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.