Molecular glass of spirofluorene derivative, preparation method thereof and use thereof in photo-etching
US9290435B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 22, 2013 |
| Grant date | Mar 22, 2016 |
| Priority date | — |
| Expiry date | Jan 22, 2033 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC07C2603/94
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
Disclosed is a molecular glass of a spirofluorene derivative having a molecular structure as follows: formula (I),wherein each of R1-R12 is a hydrogen atom, a hydroxyl group, a methoxyl group or an acid-sensitive substituent; substituents R1˜R12 can be identical or different, but on the same benzene ring the substituents cannot all be hydrogen atoms. The molecular glass has a good solubility in various polar solvents, is suitable to be made into a film; meanwhile the molecular glass has a very high glass transition temperature and meets the requirements of the photolithography processing technology. Also disclosed is a preparation method of the above-mentioned molecular glass of a spirofluorene derivative. The synthetic process of the method is simple and suitable for industrialization. Further disclosed is the use of a photo-resist with the above-mentioned molecular glass as a main material in photo-etching, wherein the molecular glass of a spirofluorene derivative with hydroxyl groups (or partly with hydroxyl groups) on the periphery thereof can be used as a negative photo-resist, and the molecular glass with the hydroxyl groups on the periphery thereof protected (or partly prote…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.