Patent · US Active

Method for operating and/or for measuring a micromechanical device, and micromechanical device

US9291455B2 · kind B2 · utility

1Cited by

3References

10Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Johannes Classen · Reutlingen, DE
Christoph Gauger · Balingen, DE
Patrick Wellner · Neckartenzlingen, DE

Key dates

Filing date	Jun 14, 2013
Grant date	Mar 22, 2016
Priority date	—
Expiry date	May 23, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG01C19/5747
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method for operating and/or measuring a micromechanical device. The device has a first and second seismic mass which are movable by oscillation relative to a substrate; a first drive device for deflecting the first seismic mass and a second drive device for deflecting the second seismic mass, parallel to a drive direction in a first orientation; a third drive device for deflecting the first seismic mass, and a fourth drive device for deflecting the second seismic mass in parallel to the drive direction and according to a second orientation opposite from the first orientation; a first detection device for detecting drive motion of the first seismic mass; and a second detection device for detecting drive motion of the second seismic mass. A first and a second detection signal are generated by the first and second detection devices, the first detection signal being evaluated separately from the second detection signal.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.