Optical position-measuring device

US9291481B2 · kind B2 · utility

Assignee

• DR. JOHANNES HEIDENHAIN GMBH · DE

Inventors

• Markus Meissner · Teupitz, DE
• Wolfgang Holzapfel · Obing, DE

Key dates

• Filing date: Dec 19, 2013
• Grant date: Mar 22, 2016
• Expiry date: Jun 15, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B11/002
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An optical position-measuring device is adapted to detect the position of an object in several spatial degrees of freedom. The object is disposed in a manner allowing it to move at least along a first direction of movement and along a second direction of movement. The position-measuring device includes at least one light source and at least one first and second measuring standard which are located on the object, extend along a first extension direction and a second extension direction and include graduation regions disposed periodically along the first and second extension directions. In addition, a scanning plate is provided, into which at least first and second retroreflector elements are integrated, the first retroreflector element extending parallel to the first extension direction and the second retroreflector element extending parallel to the second extension direction, and via which, sub-beams that fall on them from the first and second measuring standard, are reflected back in the direction of the respective measuring standard. From superposed sub-beams, a detector system is able to generate position signals at least with respect to the movement of the object along the firs…