Piezoresistive NEMS array network
US9291600B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 25, 2013 |
| Grant date | Mar 22, 2016 |
| Priority date | — |
| Expiry date | Dec 19, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0427
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor for detecting analytes, a method of making the sensor, and a method of using the sensor. In one embodiment, the present invention comprises at least one array comprising a plurality of resonators. The resonators can be arranged in a plurality of rows and a plurality of columns, and can be connected in a combined series-parallel configuration. The resonators can be adapted to vibrate independently at about the same resonance frequency and about the same phase. The sensor can also comprise an actuator and a signal detector electrically coupled to the array. The sensor can also further comprise an analyte delivery system and can be functionalized for detection of at least one analyte.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.