Semiconductor device, test structure of the semiconductor device, and method of testing the semiconductor device
US9291669B2 · kind B2 · utility
2Cited by
2References
17Claims
0Family size
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Key dates
| Filing date | Aug 28, 2014 |
| Grant date | Mar 22, 2016 |
| Priority date | — |
| Expiry date | Aug 28, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2884
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor device, a test structure of the semiconductor device, and a method of testing the semiconductor device are provided. The test structure including a first pad and a second pad being separated from each other, and a first test element and a second test element connected between the first pad and the second pad, a first value of a characteristic parameter of the first test element being different from a second value of the characteristic parameter of the second test element, may be provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.