Patent · US Active

Method for separating and recovering silicon from silicon sludge

US9296617B2 · kind B2 · utility

0Cited by

1References

4Claims

0Family size

Assignee

Korea Institute Of Geoscience And Mineral Resources · KR

Inventors

Hee Dong Jang · Daejeon, KR
Han Kwon Chang · Daejeon, KR
Dae Sup Kil · Daejeon, KR

Key dates

Filing date	Oct 17, 2012
Grant date	Mar 29, 2016
Priority date	—
Expiry date	Nov 23, 2034

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC01B33/02
WIPO fieldMaterials, metallurgy
WIPO sectorChemistry

Abstract

Disclosed is a method for selectively separating and recovering silicon from waste silicon sludge generated during a semiconductor manufacturing process. With the method for separating and recovering silicon from the silicon sludge, oil components, iron, silicon carbide that are included in the silicon sludge may be removed and silicon may be selectively separated and recovered. In addition, silicon may be efficiently recovered without injection of an additive for precipitating a specific component or without a separate device such as a magnetic separator, or the like, for removing iron.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.