Optical device for transmission-type scanning by moving scanning beam without moving observation sample
US9297980B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 13, 2013 |
| Grant date | Mar 29, 2016 |
| Priority date | — |
| Expiry date | Nov 28, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/653
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
For an optical device as a transmission-type scanning optical microscope having a pinhole or a slit for limiting the amount of a detected light beam, a method of moving a scanning beam without moving an observation sample to be scanned is realized. A scanning beam from a beam scanning mechanism that has passed through an observation sample is focused onto a reflection plate, and is then returned back again to the observation sample. A light beam that has returned back from the sample is further fed back to the beam scanning mechanism, and then, the light beam that has been limited through a fixed pinhole or a slit is detected with a photodetector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.