Method and mechanism for erosion detection of defining apertures
US9299534B2 · kind B2 · utility
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2References
17Claims
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Key dates
| Filing date | Jan 31, 2014 |
| Grant date | Mar 29, 2016 |
| Priority date | — |
| Expiry date | May 26, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24535
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A defining aperture plate having at least two differently sized apertures is used in conjunction with at least two charge collectors. Because of the difference in aperture width, the two charge collectors receive different amounts of ions, where the amount is proportional to the associated aperture width. By monitoring the ratio of the charge collected by the first charge collector to the charge collected by the second collector, the amount of erosion can be monitored and optionally compensated for.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.