Semiconductor device and display device having alignment mark
US9299662B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 30, 2013 |
| Grant date | Mar 29, 2016 |
| Priority date | — |
| Expiry date | Dec 27, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An exemplary display device includes a transparent substrate and a semiconductor device bonded to the transparent substrate. The transparent substrate includes a first alignment mark. The semiconductor device includes a substrate and a second alignment mark positioned on the substrate. The second alignment mark includes a first pattern structure positioned on the substrate and a second pattern structure positioned on the first pattern structure. The first pattern structure includes a plurality of first non-transparent marks. The second pattern structure includes a second pattern surrounded by the first non-transparent marks. The second pattern is an alignable shape that corresponds to a shape of the first alignment mark on the transparent substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.