Resonator anchors and related apparatus and methods
US9299910B1 · kind B1 · utility
8Cited by
30References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 16, 2013 |
| Grant date | Mar 29, 2016 |
| Priority date | — |
| Expiry date | Jun 19, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/02338
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Micromechanical resonators having stub anchors are described. The micromechanical resonators may be suspended, being connected to a substrate or support by one or more anchors. The anchor(s) may include one or more stubs which can impact the acoustic impedance of the anchor(s). The stub(s) may have various shapes and sizes. In some instances, multiple resonators may be coupled together by a connector having one or more stubs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.