Continuous web apparatus and method using an air to vacuum seal and accumulator
US9303316B1 · kind B1 · utility
10Cited by
35References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2011 |
| Grant date | Apr 5, 2016 |
| Priority date | — |
| Expiry date | Jul 21, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/907
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A deposition apparatus includes an input spool located in non-vacuum input module, at least one vacuum process module, an accumulator, and an air to vacuum sealing mechanism. The accumulator and the sealing mechanism are configured to continuously provide a web substrate from the input spool at atmosphere into the at least one process module at vacuum without stopping the web substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.