Pressure sensing and flow control in diffusion-bonded planar devices for fluid chromatography
US9304115B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 10, 2011 |
| Grant date | Apr 5, 2016 |
| Priority date | — |
| Expiry date | Dec 3, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7762
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Flow through pressure sensors for use in fluid chromatography systems include a planar device formed from diffusion bonding of a plurality of metallic sheets and at least one sensing element. The planar device has a top surface, a bottom surface and a flow through channel. A diaphragm formed from a portion of one of the top or bottom surfaces is located adjacent to a sensing region of the flow through channel and is attached to the sensing element. The diaphragm is sized to deflect a distance in response to fluid pressure in the sensing region, which has an internal volume of less than about 25 microliters. The diaphragm and attached sensing element form a pressure sensor that measures strain or deflection of the diaphragm to calculate a pressure within the sensing region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.