Patent · US Active

Charged particle beam system and method of operating thereof

US9305740B2 · kind B2 · utility

3Cited by

19References

16Claims

0Family size

Assignee

ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · DE

Inventors

Jürgen Frosien · Riemerling, DE
Benjamin John Cook · Munich, DE

Key dates

Filing date	Jun 18, 2013
Grant date	Apr 5, 2016
Priority date	—
Expiry date	Jun 18, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2815
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A charged particle beam device is described. In one aspect, the charged particle beam device includes a charged particle beam source, and a switchable multi-aperture for generating two or more beam bundles from a charged particle beam which includes: two or more aperture openings, wherein each of the two or more aperture openings is provided for generating a corresponding beam bundle of the two or more beam bundles; a beam blanker arrangement configured for individually blanking the two or more beam bundles; and a stopping aperture for blocking beam bundles. The device further includes a control unit configured to control the individual blanking of the two or more beam bundles for switching of the switchable multi-aperture and an objective lens configured for focusing the two or more beam bundles on a specimen or wafer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.