Mass transfer tool manipulator assembly

US9308649B2 · kind B2 · utility

Assignee

• LuxVue Technology Corporation · US

Inventors

• Dariusz Golda · Portola Valley, US
• John A. Higginson · Santa Clara, US
• Andreas Bibl · Los Altos, US
• Paul Argus Parks · Austin, US
• Stephen P. Bathurst · Lafayette, US

Key dates

• Filing date: Feb 25, 2013
• Grant date: Apr 12, 2016
• Expiry date: Jan 31, 2034

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/1461
• WIPO field: Handling
• WIPO sector: Mechanical engineering

Abstract

Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a mass transfer tool manipulator assembly allows active alignment between an array of electrostatic transfer heads on a micro pick up array and an array of micro devices on a carrier substrate. Displacement of a compliant element of the mass transfer tool manipulator assembly may be sensed to control alignment between the array of electrostatic transfer heads and the array of micro devices.