Abrasive articles, method for their preparation and method of their use

US9309448B2 · kind B2 · utility

Assignee

• BASF SE

Inventors

• Christof Kujat · Neustadt, DE
• Yuzhuo Li
• Kenneth Rushing · Ludwigshafen, DE

Key dates

• Filing date: Jan 19, 2011
• Grant date: Apr 12, 2016
• Expiry date: Jul 21, 2032

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/3212
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

Abrasive articles containing solid abrasive particles (A) selected from the group consisting of inorganic particles, organic particles and inorganic-organic hybrid particles (a1) having an average primary particle size of from 1 to 500 nm as determined by laser light diffraction and having electron donor groups (a2) chemically bonded to their surface are provided. The said solid abrasive particles (A) are distributed throughout or on top of or throughout and on top of a solid matrix (B). A method for manufacturing abrasive articles and a method for processing substrates useful for fabricating electrical and optical devices are provided. The said methods make use of the said abrasive articles.