Method for the production of metal oxide-containing layers

US9309595B2 · kind B2 · utility

Assignee

• EVONIK DEGUSSA GMBH · DE

Inventors

• Juergen Steiger · Taipei, TW
• Duy Vu Pham · Oberhausen, DE
• Heiko Thiem · Bensheim, DE
• Alexey Merkulov · Ludwigshafen, DE
• Arne Hoppe · Herne, DE

Key dates

• Filing date: Aug 13, 2010
• Grant date: Apr 12, 2016
• Expiry date: Oct 28, 2032

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C18/1258
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

The invention relates to a liquid-phase method for producing metal oxide-containing layers from nonaqueous solution. In said method, an anhydrous composition containing i) at least one metal oxo-alkoxide of generic formula MxOy(OR)z[O(R′O)cH]aXb[R″OH]d, where M=In, Ga, Sn, and/or Zn, x=3-25, y=1-10, z=3-50, a=0-25, b=0-20, c=0-1, d=0-25, R, R′, R″=organic group, X═F, Cl, Br, I, and ii) at least one solvent is applied to a substrate, is optionally dried, and is converted into a metal oxide-containing layer. The invention also relates to the layers that can be produced using the method of the invention and to the use thereof.