Apparatus and method for sub-micrometer elemental image analysis by mass spectrometry
US9312111B2 · kind B2 · utility
11Cited by
20References
20Claims
0Family size
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Key dates
| Filing date | Mar 30, 2015 |
| Grant date | Apr 12, 2016 |
| Priority date | — |
| Expiry date | Mar 30, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/401
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A mass spectrometer system having: a primary ion source capable of irradiating a segment on a planar sample with a beam of primary ions, an orthogonal ion mass-to-charge ratio, the analyzer being configured to separate secondary elemental atomic ions according to their mass-to-charge ratio by time of flight; an ion detector for detecting secondary elemental atomic ions and producing mass spectra measurements; and a synchronizer. In the system, the beam of primary ions scans across the planar sample in two dimensions and the synchronizer associates the mass spectra measurements with positions on the planar sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.