Apparatus and method for coating organic film
US9312487B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 16, 2013 |
| Grant date | Apr 12, 2016 |
| Priority date | — |
| Expiry date | Dec 16, 2033 |
Classification
- Technology area (CPC —)General
Abstract
An apparatus and method for coating an organic film are disclosed. The apparatus comprises an evaporation device, an electron emission device and a spray device; wherein the evaporation device comprises an evaporation container, the evaporation container is a linear evaporation container, in which a uniform organic gas is generated; the electron emission device is horizontally arranged over the evaporation container such that the organic gas evaporated in the evaporation container is uniformly charged and becomes charged organic gas; the spray device is provided with an electric field, under which the charged organic gas is moved toward a substrate so as to deposit the organic film on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.