Patent · US Active

Process chamber incorporating an arrangement for injecting gaseous fluid thereinto

US9316406B2 · kind B2 · utility

10Cited by

8References

16Claims

0Family size

Assignee

Duerr Systems AG · DE

Inventors

Dietmar Wieland · Waiblingen, DE
Oliver Iglauer · Stuttgart, DE
Christof Knuesel · Munich, DE
Marius Winkler · Pleidelsheim, DE

Key dates

Filing date	Apr 29, 2013
Grant date	Apr 19, 2016
Priority date	—
Expiry date	Mar 4, 2034

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF26B2210/12
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

A process chamber (5) has an interior space (39). In the interior space (39), there is a receiving region (15) for workplaces (3). The process chamber (5) has an opening (12, 14) for the entry and exit of workplaces (3). The process chamber includes an arrangement (17, 19, 25, 29, 33, 37, 35) for injecting gaseous fluid into the interior space (39). The arrangement for injecting gaseous fluid has at least one nozzle (17, 19) for producing a fluid flow curtain (21, 23) between the opening (12, 14) and the receiving region (15) for workplaces (3).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.