Micro electro-mechanical heater
US9316569B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 26, 2010 |
| Grant date | Apr 19, 2016 |
| Priority date | — |
| Expiry date | Aug 26, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/418
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sub-micron scale property testing apparatus including a test subject holder and heating assembly. The assembly includes a holder base configured to couple with a sub-micron mechanical testing instrument and electro-mechanical transducer assembly. The assembly further includes a test subject stage coupled with the holder base. The test subject stage is thermally isolated from the holder base. The test subject stage includes a stage subject surface configured to receive a test subject, and a stage plate bracing the stage subject surface. The stage plate is under the stage subject surface. The test subject stage further includes a heating element adjacent to the stage subject surface, the heating element is configured to generate heat at the stage subject surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.