Plasma cell for laser-sustained plasma light source
US9318311B2 · kind B2 · utility
16Cited by
5References
46Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 9, 2012 |
| Grant date | Apr 19, 2016 |
| Priority date | — |
| Expiry date | Apr 1, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J65/04
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A refillable plasma cell for use in a laser-sustained plasma light source includes a plasma bulb, the bulb being formed from a glass material substantially transparent to a selected wavelength of radiation, and a gas port assembly, the gas port assembly being operably connected to the bulb and disposed at a first portion of the gas bulb, wherein the bulb is configured to selectively receive a gas from a gas source via the gas port assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.