Catalyst for decomposition of perfluorinated compound containing halogen acid gas, and preparation method thereof
US9321039B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Aug 16, 2012 |
| Grant date | Apr 26, 2016 |
| Priority date | — |
| Expiry date | Oct 6, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/30
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present invention provides a catalyst for the decomposition of a perfluorinated compound containing a halogen acid gas, and a preparation method thereof. According to the present invention, the Ru—P—Al tri-component catalyst for the decomposition of a perfluorinated compound shows an excellent decomposition activity and durability with respect to the decomposition and removal of a perfluorinated compound containing a halogen acid gas, and thus can be used to decompose a chamber cleaning gas, an etchant, a solvent and the like of a perfluorinated compound from the semiconductor manufacturing industry to the LCD processing field. In addition, the present invention can be useful for decomposing and removing a perfluorinated compound discharged in a process using a halogen acid gas such as F2, Cl2, Br2 and the like.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.