Template system and nano-imprint method using the same
US9321213B2 · kind B2 · utility
0Cited by
5References
11Claims
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Key dates
| Filing date | Dec 7, 2012 |
| Grant date | Apr 26, 2016 |
| Priority date | — |
| Expiry date | May 13, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0002
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A template system, and a nano-imprint method using the same, include a template having a nano-pattern and configured to transfer the nano-pattern to a resin material on a substrate, and a pressure controlling apparatus configured to change a pressure of the template with respect to the substrate according to an intensity of bubbles captured between the substrate and the template.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.