Valve-cell vacuum deposition apparatus including a leak detection device and method for detecting a leak in a vacuum deposition apparatus
US9322098B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 20, 2013 |
| Grant date | Apr 26, 2016 |
| Priority date | — |
| Expiry date | Jul 20, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M3/226
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The leak detection device is adapted to test the tightness of an inner tank (24) of a valve cell (20) of the vacuum deposition apparatus, either at its filling flange (25) or at its inner tank valve (28). A vacuum deposition apparatus equipped with a helium detector (51) mounted as a by-pass of the output of a high-flow-rate turbomolecular pump (42) which is connected to the vacuum deposition chamber (30) of the vacuum deposition apparatus by a slide gate valve (43). A valve-cell vacuum deposition apparatus equipped with a helium-based leak detection device including gas injection elements (52, 53) adapted to inject a gaseous mixture into the outer enclosure, the gaseous mixture being consisted of pure helium and an inert gas, and a method for detecting a leak in a valve-cell vacuum deposition apparatus are also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.