Patent · US Active

Wireless MEMS sensor and method of reading the same

US9322906B2 · kind B2 · utility

3Cited by

3References

19Claims

0Family size

Assignee

Teknologian tutkimuskeskus VTT Oy · FI

Inventors

Heikki Seppä · Helsinki, FI
Ville Viikari · Espoo, FI

Key dates

Filing date	Sep 10, 2010
Grant date	Apr 26, 2016
Priority date	—
Expiry date	Oct 12, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH04Q2209/47
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

This document describes a wireless sensor comprising a MEMS resonator and an antenna directly matched thereto. Also a method of reading the wireless sensor is described. The method comprises illuminating the wireless sensor with electromagnetic energy at a first and second frequencies and receiving an intermodulation signal emitted by the wireless sensor in response to said electromagnetic energy at the first and second frequencies.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.