Method for producing a diffraction grating
US9323070B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 7, 2012 |
| Grant date | Apr 26, 2016 |
| Priority date | — |
| Expiry date | Jul 9, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/1636
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A manufacturing method for a grating is disclosed for the angular dispersion of light impinging the grating. The grating comprises tapered structures and cavities. A cavity width and/or corrugation amplitude is varied for achieving a desired grating efficiency according to calculation. A method is disclosed for conveniently creating gratings with variable cavity width and/or corrugation amplitude. The method comprises the step of anisotropically etching a groove pattern into a grating master. Optionally a replica is produced that is complementary to the grating master. By variation of an etching resist pattern, the cavity width of the grating may be varied allowing the optimization towards different efficiency goals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.