Excimer laser composite cavity

US9325143B2 · kind B2 · utility

Assignee

• THE ACADEMY OF OPTO-ELECTRONICS, CHINESE ACADEMY OF SCIENCES · CN

Inventors

• Yi Zhou · 红钢城街道, CN
• Yaoying SHAN · Beijing, CN
• Yuanyuan Fan · Beijing, CN
• Xingliang SONG · Beijing, CN
• Lijia Zhang · Tangxia, CN
• Huirong Cui · Beijing, CN
• Yu-Hsiang Wang · Hsinchu, TW

Key dates

• Filing date: Dec 20, 2012
• Grant date: Apr 26, 2016
• Expiry date: Dec 20, 2032

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S3/08036
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Disclosed is an excimer laser composite cavity, comprising a laser discharge cavity, a laser output module, a line-width narrowing module, and a laser amplification module. The laser discharge cavity contains work gas for generating laser when it is activated by an excitation source. The laser discharge cavity, the laser output module, and the line-width narrowing module constitute a line-width narrowing cavity configured to narrow down a line-width of the laser generated by the work gas. The laser discharge cavity, the laser output module, and the laser amplification module constitute an amplification cavity configured to amplify power of the laser with the line-width having been narrowed down by the line-width narrowing cavity.