Patent · US Active

Encapsulation structure comprising trenches partially filled with getter material

US9327963B2 · kind B2 · utility

1Cited by
7References
13Claims
0Family size

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Inventor

Key dates

Filing dateNov 28, 2014
Grant dateMay 3, 2016
Priority date—
Expiry dateNov 28, 2034

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An encapsulation structure comprising at least:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.