Microvalve having improved air purging capability
US9328850B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 24, 2014 |
| Grant date | May 3, 2016 |
| Priority date | — |
| Expiry date | Aug 29, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/3084
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A microvalve includes a base plate having a surface defining an actuator cavity. A venting groove extends from a first cavity portion of the actuator cavity having a dead end region to a second cavity portion of the actuator cavity having a structure that can vent air from the microvalve. A cover plate includes a surface having an actuator cavity provided therein that includes a first cavity portion having a dead end region and a second cavity portion having a structure that can vent air from the microvalve. An intermediate plate includes a displaceable member that is disposed within the actuator cavity for movement between a closed position, wherein the displaceable member prevents fluid communication through the microvalve, and an opened position, wherein the displaceable member does not prevent fluid communication through the microvalve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.