Scattered light measurement apparatus
US9329124B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 4, 2015 |
| Grant date | May 3, 2016 |
| Priority date | — |
| Expiry date | Mar 4, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/475
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scattered light measurement apparatus includes an optical measurement apparatus, and a scattered light measurement probe configured to irradiate an object with light from the optical measurement apparatus, configured to receive light from the object, and configured to output the received light to the optical measurement apparatus. The optical measurement apparatus includes: a light source configured to emit light including at least light of a measurement target wavelength; first and second optical detectors configured to detect the light received by the scattered light measurement probe; a branching unit configured to guide the light from the light source to the scattered light measurement probe and guide the light from the scattered light measurement probe to the first and second optical detectors; and a control unit configured to evaluate scattering characteristics of a surface layer of the object based on the light detected by the first and second optical detectors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.