Actuator having two piezoelectric elements on a membrane
US9329360B2 · kind B2 · utility
4Cited by
7References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 1, 2014 |
| Grant date | May 3, 2016 |
| Priority date | — |
| Expiry date | Oct 1, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/8554
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to an actuator for moving a rigid element, e.g. an optical element such as mirror, the element being mechanically coupled to a frame with a bendable coupling, wherein actuator elements are mounted on said coupling between the frame and element, the coupling and actuator elements being adapted to provide a movement to the element when subject to signal from a signal generator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.