Patent · US Active

Method and device for active wedge error compensation between two objects that can be positioned substantially to parallel to each other

US9329473B2 · kind B2 · utility

2Cited by

6References

14Claims

0Family size

Assignee

SUSS MICROTEC LITHOGRAPHY GMBH · DE

Inventors

Sven Hansen · Hamburg, DE
Matthias Conradi · Garching bei München, DE
Georg Fink · Garching an der Alz, DE

Key dates

Filing date	Feb 14, 2011
Grant date	May 3, 2016
Priority date	—
Expiry date	Sep 12, 2031

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB29C2043/5858
WIPO fieldOther special machines
WIPO sectorMechanical engineering

Abstract

The invention relates to a method and device for expanding the travel or control displacement of linear actuators that is available during an imprinting or embossing stroke. The wedge error compensating head (2) comprises a movable part (4), a stationary part (3) and at least three linear actuators (8). Each linear actuator (8) is connected to one of the parts (3, 4) at one end and to the other of the two parts (4, 3) by wedges (9) at the other end. By means of the wedges (9), it is possible to coarsely or roughly compensate for wedge errors and possible tolerances of individual subcomponents of the system. The linear actuators (8) are only used for fine or precision compensation for the wedge error. In this way, sufficient control displacement is available for the imprinting stroke with the linear actuators.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.