Methods and apparatus for fabricating capacitor structures with a terminal shield
US9331026B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 9, 2014 |
| Grant date | May 3, 2016 |
| Priority date | — |
| Expiry date | Jul 25, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A capacitor structure having a complete terminal shield is provided. The capacitor structure may include a first conductive segment with a first set of conductive fingers and a second segment structure with a second set of conductive fingers. The second set of conductive fingers may be spatially interleaved with the first set of conductive fingers in the first conductive structure. The first conductive segment may receive a first voltage, whereas the second conductive segment may receive a second voltage that is different than the first voltage. The capacitor structure further includes a conductive shielding structure that is connected to the first conductive segment. The conductive shielding structure may laterally surround the second conductive segment from at least three sides. An additional conductive shielding structure that connects to the first and second conductive segments is formed directly above the first and second conductive segments.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.