Device with suspended beam and piezoresistive means of detecting displacement of the beam and method of manufacturing the device
US9331606B2 · kind B2 · utility
1Cited by
2References
10Claims
0Family size
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Key dates
| Filing date | Sep 9, 2011 |
| Grant date | May 3, 2016 |
| Priority date | — |
| Expiry date | Jul 8, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A device with a suspended beam and piezoresistive means of detecting displacement of the beam and a method of manufacturing the device are disclosed. The device comprises a support, a suspended beam, moving parallel to the plane of the support, and means of detecting displacement, comprising at least two piezoresistive strain gauges that are not in line with each other. The beam is suspended through detection means. The two gauges are located on two opposite lateral faces of the beam respectively.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.