Thrust ripple mapping system in a precision stage and method thereof
US9331624B2 · kind B2 · utility
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4References
6Claims
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Key dates
| Filing date | Feb 25, 2013 |
| Grant date | May 3, 2016 |
| Priority date | — |
| Expiry date | Apr 23, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70725
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention proposes a thrust ripple mapping system in a precision stage with the thrust ripple mapping system comprising a moving stage, a load cell, a plurality of motors and a processing component. The load cell is coupled to the moving stage. The motors are employed in moving the load cell and the moving stage. The processing component takes a thrust force measurement at each of a plurality of moving increments of the load cell.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.