Patent · US Active

Aromatic resins for underlayers

US9334357B2 · kind B2 · utility

2Cited by
2References
11Claims
0Family size

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Key dates

Filing dateApr 30, 2015
Grant dateMay 10, 2016
Priority date—
Expiry dateApr 30, 2035

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC08G2261/90
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Polymeric reaction products of certain aromatic alcohols with certain diaryl-substituted aliphatic alcohols are useful as underlayers in semiconductor manufacturing processes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.